| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high accuracy optical measurement device by suppressing the influence of a variety of noise components included in a phase shift image in a height measurement device using an interference fringe by a phase shift method. <P>SOLUTION: A relation between the height of the measuring plane of a measuring object and the phase of the part in which the brightness of each point in an interference fringe image varies by the light having a plurality of different wavelengths according to the height of the measuring plane is mathematically formulated into a predetermined computing equation. The combination of the height of the measuring plane of the measuring object and the phase of the part in which the brightness of each point in an interference fringe image varies by the light having a plurality of different wavelengths according to the height of the measuring plane is calculated based on the mathematically formulated predetermined computing equation. The phase information obtained by the calculation is reflected to a phase code conversion table. Then, the height of the measuring plane of the measuring object can be measured. <P>COPYRIGHT: (C)2012,JPO&INPIT |
