INFRARED SENSOR AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an infrared sensor in a compact and inexpensive structure in which a large temperature difference may be obtained between a thermosensitive element used for infrared detection and a thermosensitive element used for temperature compensation.

SOLUTION: An infrared sensor comprises: an insulative film 2; a first thermosensitive element 3A and a second thermosensitive element 3B disposed to be spaced from each other on a first face of the insulative film 2; a plurality of pairs of conductive wiring films 4 formed on the first face of the insulative film 2 and respectively connected to the first thermosensitive element 3A and the second thermosensitive element 3B; an infrared absorbing film 5 provided on a second face of the insulative film 2 so as to oppose the first thermosensitive element 3A; and an infrared reflecting film 6 provided on the second face of the insulative film 2 so as to oppose the second thermosensitive element 3B. The infrared absorbing film 5 is an ITO film.

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