| 发明名称 |
IMAGING DEVICE AND METHOD FOR HIGH-SENSITIVITY OPTICAL SCANNING AND INTEGRATED CIRCUIT THEREFOR |
| 摘要 |
An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report. |
| 申请公布号 |
US2012206634(A1) |
申请公布日期 |
2012.08.16 |
| 申请号 |
US201213351542 |
申请日期 |
2012.01.17 |
| 申请人 |
KATZIR YIGAL;GUR-ARIE ITAY;MALINOVICH YACOV;ORBOTECH LTD. |
发明人 |
KATZIR YIGAL;GUR-ARIE ITAY;MALINOVICH YACOV |
| 分类号 |
H04N3/14;G01N21/88;G01N21/89;G01N21/956;G06T1/00;G06T1/60;H01L27/00;H01L27/14;H01L27/146;H04N5/374 |
主分类号 |
H04N3/14 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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