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发明名称
CLEANING OF ELECTROSTATIC CHUCKS USING ULTRASONIC AGITATION AND APPLIED ELECTRIC FIELDS
摘要
申请公布号
MY146469(A)
申请公布日期
2012.08.15
申请号
MY2008PI02295
申请日期
2006.12.11
申请人
LAM RESEARCH CORPORATION
发明人
STEGER, ROBERT, J.
分类号
B08B3/12
主分类号
B08B3/12
代理机构
代理人
主权项
地址
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