发明名称 WAFER PROCESSING TAPE
摘要 The present invention relates to a tape for processing a semiconductor wafer including: a release film having a relatively long length; an adhesive layer formed on a first surface of the release film and having a predetermined plane shape; a pressure-sensitive adhesive film having a label portion having a predetermined plane shape and formed to cover the adhesive layer in such a manner as to be brought into contact with the release film around the adhesive layer and a surrounding portion adapted to surround the outside of the label portion; and a support member formed at the both end portions of the release film in a short direction of the release film, on a second surface of the release film opposite to the first surface of the release film on which the adhesive layer and the pressure-sensitive adhesive film are formed, the support member having a coefficient of linear expansion of 300ppm/°C or less.
申请公布号 EP2192611(B9) 申请公布日期 2012.08.15
申请号 EP20080791179 申请日期 2008.07.16
申请人 FURUKAWA ELECTRIC CO., LTD. 发明人 MARUYAMA, HIROMITSU;TAGUCHI, SHUZO;SAKUMA, NOBORU;MORISHIMA, YASUMASA;ISHIWATA, SHINICHI
分类号 H01L21/683;C09J7/02;H01L21/301;H01L21/67;H01L21/68 主分类号 H01L21/683
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