The method involves Verfahren zum Laserbearbeiten,repeatedly traversing the laser beam (20) over the entire work surface (29) of component. The tilt angle of laser beam with respect to a drilling axis (17) during subsequent passing over to-be-processed surface is different from the tilt angle with respect to the drilling axis during the initial crossing of to-be-processed surface. The pulse duration of the pulsed laser beam is about 0.1-0.8 ms particularly 0.25 ms. The laser beam irradiation process is performed in the center of X and Y directions.
