发明名称
摘要 A method for manufacturing a piezoelectric vibration device wherein a substrate is prepared, and a piezoelectric resonator element is mounted on the substrate. Before or after a packaging member is joined to the substrate, the piezoelectric resonator element is exposed to an environment at a higher temperature than ambient temperature and a higher humidity than ambient humidity, and then an electrical property is measured to detect attachment of dust and/or foreign matter according to a variation of the electrical property.
申请公布号 JP4998620(B2) 申请公布日期 2012.08.15
申请号 JP20100526107 申请日期 2010.02.12
申请人 发明人
分类号 H03H3/02;H01L41/09;H01L41/18;H01L41/187;H01L41/22;H01L41/23;H01L41/311;H01L41/313;H03B5/32;H03H9/02 主分类号 H03H3/02
代理机构 代理人
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