发明名称 SILICON CARBIDE JOINED BODY AND METHOD FOR JOINING SILICON CARBIDE MEMBERS
摘要 <p>A high-purity silicon carbide conjugate having excellent heat resistance, and a method of producing such a conjugate. The silicon carbide conjugate is composed of a high-purity silicon carbide joining layer provided between a silicon carbide member and another silicon carbide member. The conjugate is obtained by interposing a curable silicone composition between the two silicon carbide members, curing the composition to obtained a cured product layer, and then thermally decomposing the cured product layer in a non-oxidizing atmosphere, thereby converting the layer to silicon carbide and joining the members together. The conjugate has excellent heat resistance and a high degree of purity.</p>
申请公布号 EP2487145(A1) 申请公布日期 2012.08.15
申请号 EP20100822096 申请日期 2010.10.07
申请人 SHIN-ETSU CHEMICAL CO., LTD. 发明人 AOKI, YOSHITAKA
分类号 C04B35/573;C04B37/00;H01L21/22 主分类号 C04B35/573
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