发明名称 |
Method and apparatus for detecting foreign materials and storage medium |
摘要 |
A foreign material detecting method for detecting a foreign material attached to a substrate surface includes a spraying step of spraying an organic solvent or an oil-phase material containing a halogen element to the substrate surface, a condensing step of emphasizing the foreign material by condensing the sprayed organic solvent or oil-phase material around the foreign material attached to the substrate surface by controlling a temperature of the substrate surface, and a surface inspecting step of detecting the foreign material emphasized by the condensation of the organic solvent or the oil-phase material by a surface inspecting device. |
申请公布号 |
US8243265(B2) |
申请公布日期 |
2012.08.14 |
申请号 |
US20090617235 |
申请日期 |
2009.11.12 |
申请人 |
MORIYA TSUYOSHI;NAGAIKE HIROSHI;YAKUSHIJI HIDEAKI;TOKYO ELECTRON LIMITED |
发明人 |
MORIYA TSUYOSHI;NAGAIKE HIROSHI;YAKUSHIJI HIDEAKI |
分类号 |
G01N21/00 |
主分类号 |
G01N21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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