发明名称 Semiconductor device with liquid repellant layer
摘要 An object is to provide technology for manufacturing a higher-reliability memory device and a semiconductor device that is equipped with the memory device at low cost. A semiconductor device of the present invention has a first conductive layer, a first insulating layer that is provided to be in contact with a side end portion of the first conductive layer, a second insulating layer that is provided over the first conductive layer and the first insulating layer, and a second conductive layer that is provided over the second insulating layer. The second insulating layer is formed of an insulating material, and wettability against a fluidized substance when the insulating material is fluidized, is higher for the first insulating layer than the first conductive layer.
申请公布号 US8242486(B2) 申请公布日期 2012.08.14
申请号 US20060795510 申请日期 2006.02.07
申请人 FUJII GEN;SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 FUJII GEN
分类号 H01L35/24;H01L51/00 主分类号 H01L35/24
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