发明名称 |
Formation of insulator oxide films with acid or base catalyzed hydrolysis of alkoxides in supercritical carbon dioxide |
摘要 |
Metal and/or silicon oxides are produced by hydrolysis of alkoxide precursors in the presence of either an acid catalyst or a base catalyst in a supercritical fluid solution. The solubility of the acid catalysts in the supercritical fluid can be increased by complexing the catalyst with a Lewis base that is soluble in the supercritical fluid. The solubility of the base catalysts in the supercritical fluid can be increased by complexing the catalyst with a Lewis acid that is soluble in the supercritical fluid. The solubility of water in the solution is increased by the interaction with the acid or base catalyst. |
申请公布号 |
US8241708(B2) |
申请公布日期 |
2012.08.14 |
申请号 |
US20050075771 |
申请日期 |
2005.03.09 |
申请人 |
WAI CHIEN M.;OHDE HIROYUKI;KRAMER STEPHEN J.;MICRON TECHNOLOGY, INC.;IDAHO RESEARCH FOUNDATION |
发明人 |
WAI CHIEN M.;OHDE HIROYUKI;KRAMER STEPHEN J. |
分类号 |
B05D1/18 |
主分类号 |
B05D1/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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