发明名称 |
Dynamic power control, beam alignment and focus for nanoscale spectroscopy |
摘要 |
Dynamic IR radiation power control, beam steering and focus adjustment for use in a nanoscale IR spectroscopy system based on an Atomic Force Microscope. During illumination with a beam from an IR source, an AFM probe tip interaction with a sample due to local IR sample absorption is monitored. The power of the illumination at the sample is dynamically decreased to minimize sample overheating in locations/wavelengths where absorption is high and increased in locations/wavelengths where absorption is low to maintain signal to noise. Beam alignment and focus optimization as a function of wavelength are automatically performed.
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申请公布号 |
US8242448(B2) |
申请公布日期 |
2012.08.14 |
申请号 |
US20100927248 |
申请日期 |
2010.11.09 |
申请人 |
PRATER CRAIG;LO MICHAEL;GOTTHARD DOUG;KURTZ ANTHONY;KJOLLER KEVIN;ANASYS INSTRUMENTS CORPORATION |
发明人 |
PRATER CRAIG;LO MICHAEL;GOTTHARD DOUG;KURTZ ANTHONY;KJOLLER KEVIN |
分类号 |
G01J5/00 |
主分类号 |
G01J5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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