发明名称 Dynamic power control, beam alignment and focus for nanoscale spectroscopy
摘要 Dynamic IR radiation power control, beam steering and focus adjustment for use in a nanoscale IR spectroscopy system based on an Atomic Force Microscope. During illumination with a beam from an IR source, an AFM probe tip interaction with a sample due to local IR sample absorption is monitored. The power of the illumination at the sample is dynamically decreased to minimize sample overheating in locations/wavelengths where absorption is high and increased in locations/wavelengths where absorption is low to maintain signal to noise. Beam alignment and focus optimization as a function of wavelength are automatically performed.
申请公布号 US8242448(B2) 申请公布日期 2012.08.14
申请号 US20100927248 申请日期 2010.11.09
申请人 PRATER CRAIG;LO MICHAEL;GOTTHARD DOUG;KURTZ ANTHONY;KJOLLER KEVIN;ANASYS INSTRUMENTS CORPORATION 发明人 PRATER CRAIG;LO MICHAEL;GOTTHARD DOUG;KURTZ ANTHONY;KJOLLER KEVIN
分类号 G01J5/00 主分类号 G01J5/00
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