发明名称 |
Lithographic apparatus having acoustic resonator |
摘要 |
A lithographic apparatus may be provided with an acoustic resonator to dampen an acoustic vibration in the lithographic apparatus. The acoustic resonator may include a Helmholtz resonator. The helmholz resonator may be provided with an active element to provide active damping and/or altering a spring characteristic of the mass spring assembly formed by the resonator. The resonator may be provided at a slit in a shield between the patterning device stage and the projection system to suppress transfer of acoustical vibrations, caused by e.g. a movement of the patterning device stage, to the projection system. |
申请公布号 |
US8243258(B2) |
申请公布日期 |
2012.08.14 |
申请号 |
US20080276115 |
申请日期 |
2008.11.21 |
申请人 |
BUTLER HANS;VAN DER WIJST MARC WILHELMUS MARIA;GEERKE JOHAN HENDRIK;DE PEE JOOST;BEIJERS CLEMENTIUS ANDREAS JOHANNES;OUDE NIJHUIS MARCO HENDRIKUS HERMANUS;DEBIESME FRANCOIS XAVIER;ASML NETHERLANDS B.V. |
发明人 |
BUTLER HANS;VAN DER WIJST MARC WILHELMUS MARIA;GEERKE JOHAN HENDRIK;DE PEE JOOST;BEIJERS CLEMENTIUS ANDREAS JOHANNES;OUDE NIJHUIS MARCO HENDRIKUS HERMANUS;DEBIESME FRANCOIS XAVIER |
分类号 |
G03B27/42;E04B1/82;G02B7/02 |
主分类号 |
G03B27/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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