发明名称 Recessed pillar structure
摘要 A bump structure that may be used to interconnect one substrate to another substrate is provided. A recessed conductive pillar is formed on a first substrate such that the recessed conductive pillar has a recess formed therein. The recess may be filled with a solder material. A conductive pillar on a second substrate may be formed having a contact surface with a width less than or equal to a width of the recess. The first substrate may be attached to the second substrate such that the conductive pillar on the second substrate is positioned over or in the recess of the first substrate. The substrates may each be an integrated circuit die, an interposer, a printed circuit board, a high-density interconnect, or the like.
申请公布号 US8241963(B2) 申请公布日期 2012.08.14
申请号 US20100835189 申请日期 2010.07.13
申请人 SHEN WEN-WEI;CHUANG YAO-CHUN;CHEN CHEN-SHIEN;CHEN MING-FA;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 SHEN WEN-WEI;CHUANG YAO-CHUN;CHEN CHEN-SHIEN;CHEN MING-FA
分类号 H01L21/00 主分类号 H01L21/00
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