| 发明名称 |
Microwave plasma processing apparatus and method for producing cooling jacket |
| 摘要 |
A microwave plasma processing apparatus has a microwave antenna in which a wavelength-shortening plate and a cooling portion of a cooling jacket are arranged adjacent to each other. |
| 申请公布号 |
US8242405(B2) |
申请公布日期 |
2012.08.14 |
| 申请号 |
US200913054014 |
申请日期 |
2009.06.24 |
| 申请人 |
NISHIMOTO SHINYA;TOKYO ELECTRON LIMITED |
发明人 |
NISHIMOTO SHINYA |
| 分类号 |
B23K10/00 |
主分类号 |
B23K10/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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