发明名称 |
Semiconductor device and manufacturing method of the same |
摘要 |
The manufacturing method of the present invention includes steps of selectively forming a photocatalyst material or a material including an amino group by discharging a composition including the photocatalyst material or the material including an amino group; immersing the photocatalyst material or the material including an amino group in a solution including a plating catalyst material so as to adsorb or deposit the plating catalyst material onto the photocatalyst material or the material including an amino group; and immersing the plating catalyst material in a plating solution including a metal material so as to form a metal film on a surface of the photocatalyst material or the material including an amino group adsorbing or depositing the plating catalyst material, thereby manufacturing a semiconductor device. The pH of the solution including the plating catalyst material is adjusted in a range of 3 to 6.
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申请公布号 |
US8241948(B2) |
申请公布日期 |
2012.08.14 |
申请号 |
US20100792816 |
申请日期 |
2010.06.03 |
申请人 |
FUJII GEN;SEMICONDUCTOR ENERGY LABORATORY CO., LTD. |
发明人 |
FUJII GEN |
分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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