| 摘要 |
A monolithic guiding blade for a mobile proof mass in a monolithic electromechanical system micro-machined in a plate having thickness H and defining plane O,x,y, the system including a base and a measurement cell including the proof mass connected to the base by the guiding blade and capable of translation displacement along axis Oy, the blade extending along axis Ox and connected to a fixed portion of the base, the blade limiting movement of the proof mass along axis Ox, comprising: a first hinge section shaped as a parallelepiped having thickness h long axis Oz, length I1 along axis Ox and width L along axis Oy; a central section essentially shaped as a parallelepiped having thickness h long axis Oz, length It along axis Ox and width Lt along axis Oy; and a second hinge section essentially in the shape of a parallelepiped having thickness h long axis Oz, length I2 along axis Ox and width L along axis Oy. |
