METALLIC CARRIER FOR LAYER TRANSFER AND METHODS FOR FORMING THE SAME

摘要

PURPOSE: A metallic carrier for layer transfer and a manufacturing method thereof are provided to have enough rigidity by forming a metallic layer on an attachment surface. CONSTITUTION: A donor structure(210) with a weakened zone(220) is formed at a predetermined depth. A transfer layer(230) is formed between an attachment surface(240) and the weakened zone. A residual donor structure is formed between the weakened zone and an opposite surface from the attachment surface. A metallic layer is formed on the attachment surface.