APPARATUS AND METHOD FOR IMPROVING RELIABILITY BETWEEN NANOMATERIAL WITH PLANAR STRUCTURE AND TARGET SUBSTRATE

摘要

PURPOSE: A reliability improving device and a method between a sheet-type structure nano thin film and a substrate are provided to uniformly weld the nano thin film to a substrate by compressing the nano thin film with a roller or a slider. CONSTITUTION: A reliability improving device(1000) between a nano thin film and a substrate comprises a transfer tool, an upper roller and a lower roller. The transfer tool transfers a substrate(110) in which a nano thin film(120) is formed on the upper side to the X-axis. The upper roller and the lower roller are respectively isolated towards the upper and the lower sides having constant distance. The upper roller and the lower roller can move towards the Z-axis and enables load control. More than 2 layered coating layers are formed on the outer circumference of the upper roller. A reliability enhancing method between the nano thin film and the substrate comprises the following steps: providing a substrate in which the nano thin film is formed on the upper side; compressing the nano thin film by transferring the upper roller and the lower roller towards the Z-axis; and compressing the nano thin film on the substrate by relative motion of the substrate, the upper roller and the lower roller.