发明名称 ROBUST SEMICONDUCTOR DEVICE
摘要 A method for producing a semiconductor component structure in a semiconductor body. In one embodiment, the method includes producing two differently doped semiconductor zones of the same conduction type, and carrying out a first implantation, implanting dopant atoms of a first conduction type into the semiconductor body via one of the sides over the whole area. A mask is produced on the one side, partly leaving free the one side. A second implantation is carried out, implanting dopant atoms of the first conduction type into the region left free by the mask proceeding from the one of the sides.
申请公布号 US2012202332(A1) 申请公布日期 2012.08.09
申请号 US201213448748 申请日期 2012.04.17
申请人 INFINEON TECHNOLOGIES AUSTRIA AG 发明人 SCHULZE HANS-JOACHIM;PFAFFENLEHNER MANFRED
分类号 H01L21/331 主分类号 H01L21/331
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