Method for manufacturing piezoelectric workpiece, involves forming several perforations on isolation zones that are formed directly superposed on piezoelectric layers between which electrode layers are provided

摘要

The method involves producing ceramic raw material, and preparing piezoelectric layers (2) as green film from the ceramic raw material. A block (1) is laminated with piezoelectric layers and electrode layers (3) provided between the piezoelectric layers, and isolation zones (6) are formed directly superposed on piezoelectric layers. The block or portions (4) of the block is relieved and sintered. The piezoelectric workpieces (7) are separated from block or portions of the block. Several perforations (5) are formed in the isolation zones. Independent claims are included for the following: (1) piezoelectric workpiece; (2) valve; and (3) plant for manufacturing piezoelectric workpiece.