摘要 |
<P>PROBLEM TO BE SOLVED: To provide a far infrared detecting element and a far infrared detecting device that can be produced at low cost with comparative ease and more readily provide tolerance against angle dispersion and wavelength dispersion. <P>SOLUTION: In a far infrared detecting element in which a first layer and a second layer of mutually differing materials are stacked over a substrate, the first layer is configured of a material absorbing far infrared rays; microstructures of a material having a higher refractive index than that of the first layer and resonant with a light ray different in wavelength from far infrared rays are formed within the second layer, the microstructures are configured of a material having a lower refractive index than the second layer and are arranged periodically in the facial direction of the second layer; and part or the whole of the material making up the second layer is arranged replacing the material of the microstructure periodically in the thickness direction of the second layer. <P>COPYRIGHT: (C)2012,JPO&INPIT |