| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a cutting method that reduces probabilities of the displacement or flaking of a workpiece during cutting and can make flat a cutting surface without damaging the workpiece. <P>SOLUTION: The cutting method includes: a first adhesive sheet attaching step of disposing a first surface side of the workpiece on a first adhesive sheet 74; a holding step of holding a first adhesive sheet side of the workpiece disposed on the first adhesive sheet with a chuck table 30; a second adhesive sheet attaching step of attaching a second adhesive sheet 86 to a second surface side opposite to the first surface side of the workpiece and also attaching the second adhesive sheet to the first adhesive sheet at the outer side of the workpiece to enclose the workpiece by the first adhesive sheet and the second adhesive sheet; and a cutting step of bringing a bite wheel 25 having a cutting blade 56 rotatable on a plane parallel to a holding surface into contact with the second adhesive sheet while rotating the bite wheel, and relatively moving the chuck table and the bite wheel to cut the second surface side of the workpiece together with the second adhesive sheet. <P>COPYRIGHT: (C)2012,JPO&INPIT |
