| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress excessive pressure fluctuation when starting replenishment of a liquid chemical, to control a filtration speed of a filter, and to maintain filtration accuracy. <P>SOLUTION: In a liquid chemical supply system for filtering a liquid chemical supplied from a liquid chemical bottle 13 in a filter 46 and then discharging it from a discharge nozzle 43 by opening/closing operations of the primary side on-off valve V1 and secondary side on-off valve V2 of a liquid chemical pump 50 and the supply/discharge operations of the liquid chemical pump, a pipe line 56 communicated to an operation chamber 53 of the liquid chemical pump includes a pressure sensor 59, a flow meter 57 and an electropneumatic regulator 58, and also has a control part 60 for controlling the electropneumatic regulator. The pressure sensor detects a pressure on an operation chamber side when the primary side on-off valve is opened when starting the replenishment of the liquid chemical to the liquid chemical pump, an exhaust flow rate discharged from the operation chamber is detected by the flow meter, and the control part regulates an exhaust pressure by controlling the electropneumatic regulator so as not to cause the excessive pressure fluctuation when starting the replenishment of the liquid chemical on the basis of the detected pressure and exhaust flow rate. <P>COPYRIGHT: (C)2012,JPO&INPIT |
