| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus and a method for producing a single crystal capable of improving cooling capacity of a cooling cylinder without generating solidification or dislocation on the melt surface, heightening pulling speed at a production time of a defect-free single crystal, thereby improving productively and the yield of the single crystal, and suppressing power consumption. <P>SOLUTION: In this apparatus 1 for producing a single crystal having at least a crucible 2 for storing a raw material melt 4, a heater 3 for heating the raw material melt 4, the cooling cylinder 16 to be cooled forcibly by a cooling medium, and a cooling chamber 12a for storing them, a heat shielding member 15 having a heat insulating material is arranged near the interface between the raw material melt 4 and a single crystal 5 which is being pulled so as to enclose the single crystal 5 which is being pulled, and the cooling cylinder 16 is arranged over the heat shielding member 15 so as to enclose the single crystal 5 which is being pulled, and a cooling cylinder peripheral heat insulating material 14 is arranged with a gap between itself and the cooling cylinder periphery so as to enclose the cooling cylinder 16. <P>COPYRIGHT: (C)2012,JPO&INPIT |
