发明名称 PELLICLE KIT FOR MANUFACTURING A PELLICLE
摘要 There is provided a pellicle kit for manufacturing a pellicle which comprises a pellicle frame having a jig hole in the outer wall of its frame bar and a jig having a jig pin which is adjusted to enter the respective jig hole until the front end of the jig pin is abutted against the tapered bottom face of the jig hole to thereby fix said pellicle frame.
申请公布号 US2012202001(A1) 申请公布日期 2012.08.09
申请号 US201213367719 申请日期 2012.02.07
申请人 HAMADA YUICHI;SEMA TATSUYA;SHIN-ETSU CHEMICAL CO., LTD. 发明人 HAMADA YUICHI;SEMA TATSUYA
分类号 B32B3/06 主分类号 B32B3/06
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