| 发明名称 |
Method for the application of a conformal nanocoating by means of a low pressure plasma process |
| 摘要 |
<p>The invention relates to a conformal nanocoating applied by a low pressure plasma process. The invention also relates to a method for making such a conformal nanocoating on a three-dimensional nanostructure, in particular a three- dimensional structure containing electrically conductive and non-conductive elements.</p> |
| 申请公布号 |
AU2011208879(A1) |
申请公布日期 |
2012.08.09 |
| 申请号 |
AU20110208879 |
申请日期 |
2011.01.21 |
| 申请人 |
EUROPLASMA NV |
发明人 |
LEGEIN, FILIP;VANLANDEGHEM, ANTHONY;MARTENS, PETER |
| 分类号 |
B05D7/24;H01J37/32;H01L23/29;H05K3/28 |
主分类号 |
B05D7/24 |
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