| 摘要 |
There is provided a pellicle which comprises a pellicle frame having eight or more jig holes in the outer wall for receiving jig pins of pellicle handling jigs; the jig holes are arranged such that the pellicle frame can be held by two or more pellicle handling jigs at the same time, and preferably the jigs holes are on the outer walls of the all frame bars so that the pellicle frame can be held by the jigs at both the longer frame bars and the shorter frame bars at the same time.
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