发明名称 |
METHOD AND SYSTEM FOR INTRODUCTION OF AN ACTIVE MATERIAL TO A CHEMICAL PROCESS |
摘要 |
A method and system of for introducing an active material to a chemical process in which a processing element including a passive component and an active element is installed within the system and exposed to a chemical process performed within the system. As the chemical process proceeds, the passive component erodes and thereby exposes the active component embedded therein. The introduction of the active component to the chemical process alters the chemical process.
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申请公布号 |
US2012199288(A1) |
申请公布日期 |
2012.08.09 |
申请号 |
US201213451685 |
申请日期 |
2012.04.20 |
申请人 |
HUGHES JOHN A.;HYLAND SANDRA;KIM RALPH;TOKYO ELECTRON LIMITED |
发明人 |
HUGHES JOHN A.;HYLAND SANDRA;KIM RALPH |
分类号 |
H01L21/3065;B32B1/08;B32B5/18;B32B27/18;B32B27/34;C23C16/50;C23F1/00;H01L21/311 |
主分类号 |
H01L21/3065 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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