MEMS SENSORS WITH CLOSED NODAL ANCHORS FOR OPERATION IN AN IN-PLANE CONTOUR MODE

摘要

A MEMS sensor includes at least one closed nodal anchor (106) along a predetermined closed nodal path (206) on at least one surface of a resonant mass. The resonant mass may be configured to resonate substantially in an in-plane contour mode. Drive and/or sense electrodes may be disposed within cavity (108) formed at least in part by the resonant mass (104), the closed nodal anchor (106), and a substrate (102). The closed nodal anchor acts as a hermetic barrier between the cavity and an external environment containing th analyte to be tested by the sensor.