发明名称 |
MICROELECTROMECHANICAL SYSTEMS TYPE SEMICONDUCTOR GAS SENSOR USING MICROHEATER HAVING MANY HOLES AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
Disclosed are an MEMS type semiconductor gas sensor using a microheater having many holes and a method for manufacturing the same. The MEMS type semiconductor gas sensor includes: a substrate of which a central region is etched with a predetermined thickness; a second membrane formed at an upper portion of the central region of the substrate and having many holes; a heat emitting resistor formed on the second membrane and having many holes; a first membrane formed on the second membrane including the heat emitting resistor and having many holes; a sensing electrode formed on the first membrane and having many holes; and a sensing material formed on the sensing electrode. |
申请公布号 |
US2012198918(A1) |
申请公布日期 |
2012.08.09 |
申请号 |
US201213345772 |
申请日期 |
2012.01.09 |
申请人 |
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
发明人 |
MOON SEUNG EON;LEE JAE WOO;CHOI NAK JIN;LEE HYUNG KUN;YANG WOO SEOK;KIM JONG DAE |
分类号 |
G01N27/04;H01L21/02 |
主分类号 |
G01N27/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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