| 摘要 |
<p>This vapor phase growing apparatus is provided with a rotating and revolving mechanism which can prevent rolling members from rolling over adjacent rolling members. The vapor phase growing apparatus is provided with the rotating and revolving mechanism, in which a susceptor (11), which is heated by means of a heating means, and which is rotated by means of a drive means, is provided with a plurality of substrate holding members (21) in the circumferential direction of the susceptor via rolling members (balls (22, 23)) such that the substrate holding members can rotate, the substrate holding members are rotated with rotation of the susceptor, and the substrates (12) held by means of the substrate holding members are rotated, while being revolved with respect to the rotating shaft of the susceptor. In the vapor phase growing apparatus, as the rolling members, rolling members having different diameters (large diameter balls (22) and small diameter balls (23)) are alternately disposed.</p> |
