VACCUM PROCESSING APPARATUS

摘要

PURPOSE: A vacuum processing apparatus is provided to reduce particle generation by horizontally moving a substrate without contacts using a magnetic force from an electromagnet or a permanent magnet as a driving force. CONSTITUTION: A first magnetic end(13) is formed on a membrane(12). A second magnetic end(21) and a third magnetic end(22) are formed on both ends of a carrier(20). The carrier fixes a substrate. A fourth magnetic end(23) is formed in a transport part. The transport part horizontally moves the carrier in a magnetic levitation state.