VACUUM VAPOR DEPOSITION DEVICE, VACUUM VAPOR DEPOSITION METHOD, AND ORGANIC ELECTROLUMINESCENCE ELEMENT FORMED USING SAID VACUUM VAPOR DEPOSITION DEVICE OR VACUUM VAPOR DEPOSITION METHOD

摘要

A vacuum vapor deposition device that forms by deposition, on top of the same surface of a member to be subjected to vapor deposition, a plurality of vapor deposition materials including at least a first vapor deposition material vapor deposited such that a concentration gradient is generated in the film thickness direction and a second vapor deposition material different to the first vapor deposition material and vapor deposited at a uniform concentration in the film thickness direction. The vacuum vapor deposition device comprises: a travel device that causes the member to be subjected to vapor deposition to travel; a first dispersal vessel that discharges the first vapor deposition material towards the member to be subjected to vapor deposition such that the concentration gradient is generated in the film thickness direction; and a second dispersal vessel that discharges a second vapor deposition material towards the member to be subjected to vapor deposition such that the uniform concentration is achieved in the film thickness direction.