| 摘要 |
<P>PROBLEM TO BE SOLVED: To effectively clean an electron beam optical lens barrel with an ozone molecule gas. <P>SOLUTION: An electron beam device lets an electron beam generated by an electron gun 102 through the inside of an electron beam optical lens barrel, shapes the electron beam, and irradiates a target 107 with the shaped electron beam. The electron beam device includes: ozone supply means 114 for supplying an ozone molecule gas to the inside of the electron beam optical lens barrel; adhesion amount measuring means for electrically measuring the amount of organic materials adhering to a peripheral surface of an electron beam passage route of the electron beam optical lens barrel; and control means for controlling a supply amount of the ozone molecule gas supplied by the ozone supply means according to the adhesion amount of organic materials measured by the adhesion amount measuring means. <P>COPYRIGHT: (C)2012,JPO&INPIT |
