| 摘要 |
<P>PROBLEM TO BE SOLVED: To achieve energy saving in operation of FFUs (fan filter units) used in a clean room while satisfying both of cleanness and temperature environment in the clean room. <P>SOLUTION: A compartmented room 190 in the clean room 200 is kept in a clean environment condition by the plurality of FFUs 10a to 10n attached to a ceiling of the room 190. A plurality of temperature sensors 20a to 20n for detecting temperatures of respective sections in the room 190, respectively, and a plurality of cleanness detectors 40a to 40n for detecting cleanness of the respective sections in the room 190, respectively, are prepared. A control device 180 controls, on the basis of detection results by the plurality of temperature sensors and the plurality of cleanness detectors, rotation frequencies of air-sending tools that the respective plurality of FFUs have, respectively. The control device 180 finds, for each of the FFUs, the allowable minimum air-flow amounts concerning the temperature and the cleanness to be sent by the air-sending tool that the each of the FFUs has by using the temperature detected by the temperature sensor corresponding to the each of the FFUs and the cleanness detected by the cleanness sensor corresponding to the each of the FFUs, and commands the each of the FFUs to send air of the allowable minimum air-flow amount that is a larger one out of the allowable minimum air-flow amounts concerning the temperature and the cleanness, respectively. <P>COPYRIGHT: (C)2012,JPO&INPIT |
