| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a low valence titanium oxide composition having a fine particle form suitable for producing a low valence titanium oxide-doped zinc oxide target free from abnormal discharge trouble in sputtering, and to provide a method for producing the low valence titanium oxide composition at an extremely low cost. <P>SOLUTION: The particulate low valence titanium oxide composition develops a plurality of low valence titanium oxide peaks corresponding to a titanium valence of <4 in the X-ray diffraction profile and has a primary particle diameter of 50 nm to 1 μm. The composition can be produced through a step to calcine a mixture of a titanium dioxide and carbon in an air flow at 1,000-1,500°C in a closed vessel capable of releasing inner gas from the vessel in the case of increasing inner pressure. <P>COPYRIGHT: (C)2012,JPO&INPIT |
