| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sensor device in which deterioration in detection performance is suppressed. <P>SOLUTION: A sensor device comprises: a package body 2 having a bottom surface inclined at an angle of θ with respect to a mounting surface; an angular velocity sensor element 1 mounted on the bottom surface; a lid 5 attached to the package body 2 such that a hollow portion 2A storing the angular velocity sensor element 1 is formed on the bottom surface; and a die bond material 4 disposed between the bottom surface and the angular velocity sensor element 1, having flexibility higher than the flexibility of the package body 2. <P>COPYRIGHT: (C)2012,JPO&INPIT |
