| 摘要 |
<P>PROBLEM TO BE SOLVED: To shorten the time for laser-processing a to-be-processed region which needs to be scanned by a laser beam in a direction orthogonal to a process proceeding direction, too. <P>SOLUTION: In an apparatus for removing a function layer 3 of a work 1 by irradiating the lower surface of the to-be-processed region 5 with the laser beam while moving the work 1 along a longitudinal direction of to-be-processed region 5, the moving speed of a light-focusing point position by a galvanometer mirror 34 is made higher than the moving speed of the work 1, and further, the moving locus of the light-focusing point of the laser beam is so set that the moving distance in the process proceeding direction X1 is made longer than the moving distance in an indexing direction Y. <P>COPYRIGHT: (C)2012,JPO&INPIT |
