| 摘要 |
A semiconductor device has a semiconductor chip mounted on a circuit board. The semiconductor chip includes: a semiconductor substrate; a first pad formed on the semiconductor substrate; a second pad formed on the first pad via an interlayer insulating film; a via formed through the interlayer insulating film for connecting the first pad with the second pad; a protection film that is formed on the second pad and has an opening exposing a center portion of the second pad; and a barrier metal layer formed on the portion of the second pad exposed from the opening of the protection film and on a portion of the protection film surrounding the opening. The diameter of the via is smaller than the diameter of the opening of the protection film, and the center of the via corresponds with the center of the barrier metal layer.
|
