BOW PROBE BLOCK HAVING A BOW PROBE AND MANUFACTURING METHOD BOW PROBE THEROF

摘要

PURPOSE: A bow probe block having a bow probe and a manufacturing method thereof are provided to finely form 20um to 40um of a contact piece beam portion and a conducting piece beam portion of a bow probe by making the bow probe using a micro electromechanical system. CONSTITUTION: A contacting tip(21) is formed in a lower portion of a contact piece beam portion(25). A contact piece beam portion limit protrusion(23) is formed on the top of the contact piece beam portion. A deflection piece beam portion(35) is formed between a conducting piece beam portion limit protrusion(53) and the end of the contact piece beam portion limit protrusion. A deflection maintenance portion(33) is formed at one end of the deflection piece beam portion. A deflection hole(37) smoothing X-axis deflection is formed in the deflection maintenance unit.