| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain tomographic image data close to an actual shape of an object to be inspected. <P>SOLUTION: A tomographic imaging apparatus includes: a light source for generating light; an optical splitter unit for splitting the light from the light source into reference light and measuring light; a reference optical system including an adjustment unit for adjusting an optical path length of the reference light; a spectral unit for spectrally splitting combined light of the reference light and the return light obtained by irradiating the object to be inspected with the measuring light so as to acquire an interfering signal; a detection unit for detecting an optical path length when a tomographic image of the object is photographed; a storage unit for recording data about a refractive index of a refracting element of the object; and a calculation unit for calculating image data from the interfering signal acquired by the spectral unit based on an actual size using data about the optical path length and the refractive index. <P>COPYRIGHT: (C)2012,JPO&INPIT |
