| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a liquid processing apparatus which separates a region in a processing chamber from a region in an arm standby part by covering up openings, which are provided on a wall dividing the processing chamber from the arm standby part and allow nozzle support arms to pass therethrough, with the nozzle support arms. <P>SOLUTION: In a liquid processing apparatus 10, a wall 90 is provided to divide a processing chamber 20 from an arm standby part 80, and openings 88a, through which nozzle support arms 82 respectively pass, are provided at an arm cleaning part 88 of the wall 90. Each nozzle support arm 82 covers up the opening 88a of the arm cleaning part 88 of the wall 90 while standing by at the arm standby part 80. <P>COPYRIGHT: (C)2012,JPO&INPIT |
