发明名称 Pulse to Pulse Energy Equalization of Light Beam Intensity
摘要 A system for equalizing pulse to pulse energy of a light beam includes a group of optical devices including an optical device configured to exhibit nonlinear properties, e.g., higher order or third order nonlinear properties. Transmission properties of an unequalized light beam passing through the group of optical devices change such that an output intensity of a resulting light beam output from the optical devices is equalized. One example configuration includes at least first and second prisms having nonlinear properties, i.e., higher order or third order, and configured as a beam steering system.
申请公布号 US2012200839(A1) 申请公布日期 2012.08.09
申请号 US201213447695 申请日期 2012.04.16
申请人 ARIF MUHAMMAD;ASML HOLDING N.V. 发明人 ARIF MUHAMMAD
分类号 G03B27/54;F21V5/02;G02B5/04;G02F1/29 主分类号 G03B27/54
代理机构 代理人
主权项
地址