MICRO-PATTERNING METHOD BY FORMING DOUBLE PATTERN

摘要

PURPOSE: A method for fine pattering by forming a double pattern is provided to improve manufacturing productivity by forming a molding object using a thin film sheet and a mold. CONSTITUTION: A thin film sheet(10) and a mold(20) are prepared. The thin film sheet is arranged between the mold and a molding object. The molding object is molded by the mold and the thin film sheet. The thin film sheet has a surface roughness. The mold includes a pattern on the surface.