| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a processing apparatus capable of suppressing running cost and facility cost of a clean room. <P>SOLUTION: A processing apparatus includes: a chuck table for holding a workpiece; processing means for processing the workpiece held on the chuck table while supplying processing water to the workpiece; and a housing for covering the chuck table and the processing means. The processing means is equipped with a mist treatment device for treating mist, and the mist treatment device includes: a suction duct connected to an inside of the housing, for sucking the mist generated in the processing; and mist removal means connected to the suction duct, for removing the mist from air after capturing the mist being sucked. Further, the mist removal means includes demisters and a fan unit. In the processing apparatus, clean air discharged through the fan unit is discharged into the clean room or returned to the inside of the housing. <P>COPYRIGHT: (C)2012,JPO&INPIT |
