发明名称 METHOD FOR MANUFACTURING MAGNETIC DISC SUBSTRATE
摘要 <p>Provided is a method for manufacturing a magnetic disc substrate enabling embedding of alumina to be reduced. The method for manufacturing a magnetic disc substrate has the following steps (1) through (4); that is, (1) a step for polishing a surface to be polished on a substrate to be polished, the surface being polished by using a polishing liquid composition A containing alumina particles and water; (2) a step for polishing the surface to be polished of the substrate obtained in step (1) by using a polishing liquid composition B containing silica particles and water, the silica particles having an average primary particle diameter (D50) of 5 to 60 nm, and the standard deviation of the primary particle diameter being less than 40 nm; (3) a step for cleaning the substrate obtained in step (2); and (4) a step for polishing the surface to be polished of the substrate obtained in step (3) using a polishing liquid composition C containing silica particles and water.</p>
申请公布号 WO2012105322(A1) 申请公布日期 2012.08.09
申请号 WO2012JP50993 申请日期 2012.01.18
申请人 KAO CORPORATION;HAMAGUCHI TAKESHI 发明人 HAMAGUCHI TAKESHI
分类号 G11B5/84;B24B37/00;B24B37/10;C09K3/14 主分类号 G11B5/84
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