| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a stable signal in an optical system capable of obtaining a high-resolution image as compared to a conventional optical system by using interference. <P>SOLUTION: Light of a specific polarization state of response light emitting from an object is selected and separated into two beams. The two separated beams are brought into different polarization states, one of the beams is subjected to image inversion, and then both of the beams are collected and interfered. Interference light is separated into a plurality of beams, and different polarization filters are inserted for the beams so as to detect the beams. By performing processing combining respective signals, stable amplitude information not affected by phase difference of both of the beams is obtained. <P>COPYRIGHT: (C)2012,JPO&INPIT |
