| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a spinner cleaning device which prevents cutting chips mixed in a scattered mist from re-adhering to a surface of a workpiece even though the mist in which the cutting chips are mixed is scattered by injecting a cleaning fluid into the workpiece. <P>SOLUTION: A spinner cleaning device includes a rotary spinner table holding a workpiece and a cleaning fluid injection mechanism including a cleaning fluid injection nozzle having an injection port that injects the cleaning fluid on the workpiece held by the spinner table. The spinner cleaning device includes mist suction means that has: a dust collecting umbrella disposed so as to cover a rear part of the injection port of the cleaning fluid injection nozzle; a suction tube disposed with its one end being in communication with a suction port provided at the dust collecting umbrella; and a suction source to which the other end of the suction tube is connected. <P>COPYRIGHT: (C)2012,JPO&INPIT |
