| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus capable of promptly detecting that a scanning mirror has been stopped due to the failure of scanning device. <P>SOLUTION: A laser beam machining apparatus includes a laser generation means for generating laser light L, a scanning mirror 471 for reflecting the laser light L toward a workpiece W, a position control means for generating a position control signal Vr to specify the rotational position of the scanning mirror 471, an angle sensor 75 for generating a position detection signal Vpos by detecting the rotational position of the scanning mirror 471, a position deviation signal generation part 71 for getting a control deviation in accordance with the rotational position of the scanning mirror 471 based on the position control signal Vr and the position detection signal Vpos, mirror driving parts 72, 73, 472 for rotating the scanning mirror 471 based on the control deviation, and a failure detection part 475 for detecting the failure of the mirror driving part based on the control deviation. <P>COPYRIGHT: (C)2012,JPO&INPIT |
